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Temperature Control System for Plasma Etching

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Temperature Control System for Plasma Etching

 

In semiconductor production, plasma etching is the core part of the process chain, including dry etching and wet etching. In dry etching, semiconductor plates (wafers) are plasma treated in a vacuum etching chamber. Ions in the plasma bombard the wafer, causing the material to break away. For example, the oxide layer on a silicon wafer can be removed in this way and then coated with a doped layer (which has foreign atoms added and therefore has some conductivity).

The temperature of the plasma affects the speed and efficiency of etching. If the temperature is too low, the plasma is not active enough to ablate material effectively. If the temperature is too high, the material may be over-ablated, causing errors and damage. Therefore, in semiconductor production, the most precise control of the plasma temperature is very important because the wafers are processed in the range between micrometers and nanometers. Even small changes in temperature can cause significant changes in the size and shape of etched structures. Wuxi Guanya can provide specialized temperature control solutions for the sensitive process of dry etching.

 


 

We provide complete temperature control systems design and manufacturing. From standard models to complete customized products. We specialize in customer service and are dedicated to helping each customer have the optimal temperature control system for their specific need.

We provide non-standard customized solutions. Both single cooling chillers and cooling & heating combo units are available.

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Email: lilia@lneya.com    WeChat ID: +8615251628237    WhatsApp: +86 17851209193

 

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semiconductor chiller

TES Series (Custom Designs)

Suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations.

 

Temperature range -45°C ~ +250°C series -85°C ~ +200°C series -60°C ~ +200°C series
Cooling Capacity0.3 ~ 25kW0.25 ~ 25kW3 ~ 60kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

 

LTS Series (Fluorinated Liquid) (Custom Designs)

Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

 

Temperature range -20°C ~ +80°C series -45°C ~ +80°C series -60°C ~ +80°C series -80°C ~ +80°C series
Flow Control7 ~ 45 L/min7 ~ 45 L/min7 ~ 45 L/min7 ~ 45 L/min
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

SEMICONDUCTOR CHILLER

 

FLT Series (Custom Designs)

The semiconductor temperature control system chiller is mainly used for precise temperature control in the semiconductor production process and testing process. It is specially developed and designed for the semiconductor industry.

 

 

Temperature range +5°C ~ +40°C -25°C ~ +40°C -45°C ~ +40°C -80°C ~ +80°C -100°C ~ +80°C
Cooling Capacity6 ~ 40kW2 ~ 15kW1 ~ 8kW0.6 ~ 3kW1.5 ~ 3kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 

 


 

semiconductor chiller

 

FLT Multi Channel Temp Contol (Custom Designs)

Multi channel independent temperature control, which can have a separate temperature range, cooling and heating capacity, thermal conductivity medium flow rate, etc., adopts two independent systems. According to the required temperature range, steam compression refrigeration or ETCU non compressor heat exchange system can be selected. The system can be used for universal expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and operation steps.

 

Temperature range -20°C ~ +90°C-45°C ~ +80°C-10°C ~ +80°C-20°C ~ +100°C
Cooling Capacity4kW5 ~ 13kW3 ~ 6kW8 ~ 15kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

chiller for semiconductor

 

FLTZ Series Frequency Conversion (Custom Designs)

Double frequency conversion series temperature control system, circulation pump and compressor are all adjusted by frequency conversion.

 

 

Temperature range -30°C ~ +40°C
Cooling Capacity5 ~ 11kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

semiconductor chiller

ETCU Series (Custom Designs)

Heat exchange type

System without compressor

 

 

 

Temperature range +5°C ~ +90°C
Cooling Capacity5 ~ 30kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

coolant distribution unit

 

ZLFQ Series (Custom Designs)

Coolant Distribution Unit

Liquid cooling equipment is suitable for semiconductor testing, electronic equipment constant temperature testing, cooling server supporting infrastructure, and other fluid temperature control places.

 

 

 

Temperature range +5°C ~ +35°C +5°C ~ +35°C
Cooling Capacity15 ~ 150kW200 ~ 500kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 


 

thermal plates

 

 

MD Thermal Chucks Series (Custom Designs)

It is used for testing RF devices and high-density power devices (IGBTs and MOSFETs), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc.

 

 

 

Temperature range -75°C ~ +225°C
Temperature accuracy±0.1℃
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

 

 

Gas Temperature Control Systems                                                               

 

 

AES Series Jet Impact Testing Machine

(Custom Designs)

Temp Control Range: -120°C ~ +225°C

 

 


 

AI Series Recirculating Air Temperature Control System

(Custom Designs)

Temp Control Range: -105°C ~ +125°C

 

 

 


 

 

LQ Series Gas Refrigeration System

(Custom Designs)

Temp Control Range: -110°C ~ -40°C

 

 

 

 


 

YQH Series VOCs Waste Gas Condensation Recovery Devicegas chiller

(Custom Designs)

Applied to gas condensation liquefaction recovery. The exhaust gas or other electronic gases are connected to the equipment through the induced draft fan (vacuum pump), liquefied, collected and separated into the collection tank by lowering the temperature, and other gases are discharged, so as to realize the condensation, capture and recovery of the gas.

 


 

water chillers

ZLJ / SLJ Series (Custom Designs)

It is suitable for places where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large. It can also be used for gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.

 

 

Temperature range -40°C ~ -15°C -80°C ~ -50°C -150°C ~ -110°C
Cooling Capacity0.5 ~ 4kW0.37 ~ 3.1kW2.5 ~ 9kW
ZLJ SeriesSLJ Series
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized

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