Application of Chiller in Semiconductor Industry

Application of Chiller in Semiconductor Industry

A chiller is a cooling device that provides constant temperature, constant current, and constant pressure for cooling air or equipment. Because a large amount of heat is generated in the production process of semiconductor circuit boards, components, chips, etc., precise temperature control of the chiller is required, so the chiller is widely used in the semiconductor industry.

Semiconductors are high-tech and high-precision products. At present, due to the country’s strong support for the development of the semiconductor industry, various semiconductor materials such as memory and logic devices will generate heat in the manufacture, which needs to be dissipated and controlled before production can run normally. According to the requirements of high precision, high efficiency, stability and remote control in the use of semiconductors, we provide solutions for chillers, design and manufacture the cooling system of the semiconductor production line platform, provide high-precision temperature-controlled coolant, adjustable water flow and The water pressure chiller equipment has the functions of remote operation and monitoring, long-term stable operation, data reading and query, etc., to achieve the cooling effect of the semiconductor automatic production line system.

According to the characteristics of the semiconductor industry, choosing a chiller with high performance, high precision and superior control capability is the current supporting equipment for chip processing cooling, component processing cooling, and semiconductor processing cooling. Therefore, chillers are widely used in major semiconductor manufacturing enterprises.

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ウォーターチラー

温度制御範囲：-150℃～+50

ダイナミック温度制御システム

温度制御範囲：-120°C～+350°C

自動車用テスト・チラー

温度制御範囲：-40℃～+100

半導体テストチラー

温度制御範囲：-85℃～+250

工業用冷蔵庫

温度制御範囲：-150℃～-10