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業界ニュース
Temperature Control Solutions in Semiconductor Industry The semiconductor industry has extremely high requirements for temperature control, especially in wafer manufacturing, packaging testing, lithography, etching, ion implantation and other links. Slight changes in temperature will affect product yield and process stability. The following are several main temperature control solutions: 1. Liquid circulation temperature control Principle: Accurately adjust the temperature of the equipment or process by circulating cooling liquid or heating liquid (such as water, oil, fluorinated liquid, etc.). Application: lithography machine, etching machine, CVD/PVD equipment, wafer detection equipment, etc. Typical solution: Circulating cooling system (Chiller): Use coolant to adjust the temperature. Heat exchange system: Use heat exchanger to control temperature […]
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