Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.
1. The pressure holding test of the medium circulation system is 7 bar.
2. Use high-quality magnetic pump without mechanical shaft seal.
3. Optimize temperature sampling and response speed, specially designed control algorithm, can respond quickly to stable temperature control.
4. Enhance the design of circulating pump capacity to meet the high-lift requirements of the system.
5. Continuous high temperature cooling technology meets the requirements of stable operation when heat is loaded on the heat sink plate and requires constant temperature control of cooling and heating.
6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.
Product Parameters (All products can be customized)
|Temperature control accuracy
|±0.1℃ at -20℃～0℃
|The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
|Internal circulating fluid volume
|Expansion tank volume
|System pressure display
|The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
|The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
|Siemens PLC, fuzzy PID control algorithm, with cascade control algorithm
|Heat transfer medium outlet temperature control mode
|External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
|Letter of agreement
|Ethernet interface TCP/IP protocol
|RS485 interface modbus RTU protocol
|Internal temperature feedback of equipment
|Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
|Closed circulation system
|The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
|Emerson Copeland/Danfoss Scroll Flexible Compressor
|German brand magnetic circulation pump
|Adopt Danfoss/Gaoli plate heat exchanger
|Micro channel condenser (air-cooled)
|Plate heat exchanger (water-cooled), special attention: clean factory water is required
|Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
|Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
|With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
|In and out interface size
LNEYA attends various exhibitions at home and abroad every year. At the exhibition, we show the latest research equipment of LNEYA. Every year, long-term cooperative customers will come to exhibitions and communicate with us. We are also actively developing new customers to provide them with high quality machines and services.
After sale service
Guarantee that the goods are sold to be conform to the provisions of the contract and qualified new products by factory inspection, quality performance, technical indicators and configured are in accordance with manufactures and technical documents stipulated in the contract.
Installation and debugging
After the arrival of the goods, my company or my company agent is responsible for installation and debugging of equipment need on-site installation and debugging.
Inspection and acceptance
After installation and debugging, acceptance by the customer to confirm the goods to be conform to the provisions of the contract and qualified new products, quality performance, technical indicators and configured are in accordance with manufactures and technical documents stipulated in the contract, and after the confirmation of a full set of technical documents, sign the installation acceptance report and confirm acceptance.
At the same time of installation and debugging of equipment, my company’s after-sales service engineer is responsible for technical training for user until user can be skilled of operation. In the process of using equipment by customer, customer can consult relevant technical issues to after-sales service personal of our company at any time, according to the situation, my company will arrange training on site or remote.
After sale service commitment
A full free one year warranty since the date of acceptance, during the warranty period, all repairs and spare parts are free of charge(instrukent malfunction caused bu human factors will be charged of cost price of spare parts); After the warranty period, we will be responsible for maintenance of equipment for lifetime, according to the actual maintenance fees, appropriate fee will be charged.
(PS:There will have extra charge if the customer need on-site service. And customers need to describe the issue first and then send some failed pics or videos in advance, then Lneya judge if it is possible to go for after-Sales on site. )