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FLTZ Frequency Conversion Chiller for Semiconductor

FLTZ Frequency Conversion Chiller for Semiconductor

  • Temperature Control Range: -30°C ~ 40°C (optional: -30°C ~ 90°C)
  • Customized PLC Controller, Electronic Expansion Valve, etc.
  • Precise Temperature Control Of Semiconductor Production Process And Testing Process

Note: Both Air Cooled And Water Cooled Are Available. Explosion Proof Cabinet Can Be Customized.

 

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The semiconductor temperature control device Chiller is mainly used in the precise temperature control of the semiconductor production process and testing process. The products include fluid fluorinated liquid temperature control (minimum -100 ℃), gas cold and hot rapid temperature change, rapid temperature change cold plate, low temperature gas Refrigeration system (-120°C), direct cooling type refrigeration equipment (-150°C), etc. The company applies a variety of algorithms (PID, feed-forward PID, model-free self-building tree algorithm) in the system to achieve rapid system response and high control accuracy.

semiconductor chiller

semiconductor chiller

Important information such as exhaust and suction air temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank liquid level and other important information of the chiller are all connected through sensors The control system conducts comprehensive management and monitoring records.

  1. The heating method within 40 ℃ is heated by compressor hot air.
  2. The circulation system adopts a fully closed design, and the circulation pump adopts a magnetic drive pump.
  3. 100% helium detection, 100% safety inspection to ensure the safety
    and reliability of the system.
  4. 100% continuous operation of copy machine after 24 hours.
  5. Condenser Micro-channel heat exchanger (air-cooled), plate heat exchanger (water-cooled)
  6. Evaporator: plate heat exchanger
  7. Throttling device: electronic expansion valve
  8. Control system: PLC programmable controller
  9. Communication: RS485 interface Modbus RTU protocol, Ethernet interface TCP/IP protocol
  10. Operation interface: Wuxi Guanya customized 7-inch color touch screen, temperature curve displayEXCEL data export
  11. Circulation system: The whole system is a fully closed system, low temperature does not absorb moisture in the air, does not volatilize heat transfer medium, low temperature automatically replenishes heat transfer medium into the circulation system.
  12. Shell material: cold-rolled plate spray RAL7035
  13. The inside of the pipeline contains: stainless steel SUS304, copper, ceramics, silicon carbide, silicone sealant, PTFE.

semiconductor chillersemiconductor chiller

semiconductor chillersemiconductor chiller

 

Customized Solutions For Your Process Needs

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Model FLTZ-305W FLTZ-305W/2T          Dual system
Temp range -30℃~40℃ -30℃~40℃ -30℃~40℃
Temp accuracy ±0.1℃ ±0.1℃ ±0.1℃
Flow control 15~45L/min ±0.3 15~45L/min ±0.3 15~45L/min ±0.3
Pump pressure 6bar max 6bar max 6bar max
Heating 2.5kw 2.5kw 2.5kw
Cooling capacity @15℃ 11kw 11kw 11kw
Cooling capacity @-15℃ 5kw   about4500rpm 5kw   about4500rpm 5kw   about4500rpm
Internal circulation fluid volume 8L 8L 8L
Expansion tank volume 15L 25L
Heat transfer medium Fluorinated fluid, antifreeze fluid, heat conduction silicone oil, etc.
Heat transfer medium interface ZG3/4 ZG3/4 ZG3/4
Cooling water interface ZG3/4 ZG3/4
Cooling water flow 30L/min @20℃ 60L/min @20℃
Power 220V 50/60HZ 220V 50/60HZ
Breaker 40A 80A
Size (mm) 450*700*1600 650*850*1600
3.5kw electric heating is optional, the temperature can be extended to 90°C, and the power supply needs to be changed to 380V

 

 

Customized Solutions For Your Process Needs

Leave a Message                  Email Us                      WhatsApp

 

Model FLTZ-305W FLTZ-305W/2T          Dual system
Temp range -30℃~40℃ -30℃~40℃ -30℃~40℃
Temp accuracy ±0.1℃ ±0.1℃ ±0.1℃
Flow control 15~45L/min ±0.3 15~45L/min ±0.3 15~45L/min ±0.3
Pump pressure 6bar max 6bar max 6bar max
Heating 2.5kw 2.5kw 2.5kw
Cooling capacity @15℃ 11kw 11kw 11kw
Cooling capacity @-15℃ 5kw   about4500rpm 5kw   about4500rpm 5kw   about4500rpm
Internal circulation fluid volume 8L 8L 8L
Expansion tank volume 15L 25L
Heat transfer medium Fluorinated fluid, antifreeze fluid, heat conduction silicone oil, etc.
Heat transfer medium interface ZG3/4 ZG3/4 ZG3/4
Cooling water interface ZG3/4 ZG3/4
Cooling water flow 30L/min @20℃ 60L/min @20℃
Power 220V 50/60HZ 220V 50/60HZ
Breaker 40A 80A
Size (mm) 450*700*1600 650*850*1600
3.5kw electric heating is optional, the temperature can be extended to 90°C, and the power supply needs to be changed to 380V

 

CUSTOM OPTIONS

  • CUSTOM CHILLER SIZES

Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements.

No matter how many tons of chiller you need, we can create the best solution.

  • CUSTOM TEMPERATURE RANGES

We can create a custom solution for temperatures from -150℃ to +350℃.

Custom temperature ranges for specific industries.

  • CUSTOM COOLING CAPACITY

We offer a very wide range of cooling capacities for various industries.

  • CUSTOM CHILLER TYPES

We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers.

Regardless of the type of refrigeration compressor, we can design it according to your requirements.

  • CUSTOM CHILLER ACCESSORIES

We use a variety of internationally renowned accessories, all of which can be customized for your needs, such as compressors, evaporators, heat exchangers, circulation pumps, controllers, expansion valves and shell materials, etc.

  • CUSTOM CHILLER VOLTAGE

Customize chiller voltage and phase according to your needs.

Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.

  • OTHER CUSTOMIZED SOLUTIONS

 

Tell Us More About Your Needs       

 

OUR ADVANTAGES

We offer:

Experience you can count on—

We’ve been designing and building custom products for more than 20 years. From medical chillers to energy storage chillers and everything in between, we’ve built products for virtually every industry and every application.

Same day quotes—

Get a quote for your project today! We often provide custom quotes in as little as 30 minutes.

24/7 customer service—

We are always here for you. Whether you have a question or need a quote, there’s always somebody here to communicate with you 24/7.

Durable, reliable equipment—

Our products are built with premium-grade materials, and we offer competitive warranties on all custom products.

 

Request A Quote                  Email Us                      WhatsApp

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