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Products and Solutions for Semiconductor / Electronics


Products and Solutions for Semiconductor / Electronics


Semiconductor temperature control technology is an important technical means that can achieve precise temperature control of semiconductor devices. Through the combination of passive and active temperature control, the temperature control needs of different fields can be met. With the continuous advancement of science and technology, semiconductor temperature control technology will play an important role in more fields and promote the development of related industries.

Our temperature control equipment ensures highly accurate and constant temperatures in the manufacturing process of electronic components and semiconductors. In the demanding production processes for the ever-shrinking microcircuits, reproducible temperatures are an essential factor for consistent manufacturing quality. In the fields of semiconductors and electronics, our temperature control units are used, for example, for the temperature control of etching baths for the wet-chemical production of wafers and microchips. Other applications include metal organic vapor deposition (MOCVD) in semiconductor deposition and temperature-dependent functional and material testing of electrical and electronic components and functional assemblies using non-conductive thermofluids such as Galden or FC77.


Our engineers will be happy to advise you personally and answer your questions about our solutions

Email:           WhatsApp: +86 17851209193


Products and Solutions for Semiconductor / Electronics



Advantages of Semiconductor Cooling                                                      


Semiconductor refrigeration utilizes the thermoelectric effect of semiconductor materials. Its basic principle is that in semiconductor materials, when current passes through, electrons generate heat within the material. If a temperature gradient is generated at both ends of the material, then due to the thermoelectric effect, electrons will move in the material and transfer heat from the high-temperature side to the low-temperature side, thereby achieving a cooling effect. By controlling the magnitude and direction of the current, cooling and heating of semiconductor materials can be achieved.

High Performance

The semiconductor temperature control system can quickly respond to temperature changes and accurately control the temperature, allowing the system to maintain stable working conditions in high and low temperature environments. Compared with traditional refrigeration systems, semiconductor temperature control systems have higher refrigeration efficiency and lower energy consumption.

Energy Saving and Environment Friendly

The refrigerant used in traditional refrigeration systems often enters the evaporator, reducing the refrigeration effect and causing pollution to the environment. The semiconductor temperature control system does not require the use of traditional refrigerants, reducing the burden on the environment and making it more environmentally friendly.

Safe and Reliable

The semiconductor temperature control system is manufactured using advanced semiconductor materials and precise processes, and has a long service life and good stability. In addition, the system also has good anti-electromagnetic interference and anti-seismic performance, and can adapt to various complex working environments.

Cooling & Heating Quick Switching

The semiconductor temperature control system has two functions, both cooling and heating, and cooling and heating can be quickly switched.

Precise Temperature Control

The semiconductor temperature control system enables precise temperature control within a range of ±0.1°C. Coupled with temperature detection and control means, it is easy to realize remote control, program control, and computer control, making it easy to form an automatic control system.



Applications of Semiconductor Cooling                                                     

Products and Solutions for Semiconductor

  •  Electrochemical Thermcells
  •  Electronic Products
  •  Microchips
  •  Optoelectronic Devices
  •  Process Cooling
  •  Silicon Wafer Manufacturing
  •  Wet Chemical Etching Baths


Tell us about your application, and we’ll design a chiller for you





We provide complete industrial chiller design and manufacturing. From standard models to complete customized chiller systems up to 1000 tons. We specialize in customer service and are dedicated to helping each customer have the optimal air or water chiller system for their specific need.

We provide non-standard customized solutions. Both single cooling chillers and cooling & heating chillers are available.


Email:           WhatsApp: +86 17851209193



semiconductor chiller

TES Series (Custom Designs)

Suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations.


Temperature range -45°C ~ +250°C series -85°C ~ +200°C series -60°C ~ +200°C series
Cooling Capacity0.3 ~ 25kW0.25 ~ 25kW3 ~ 60kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized




LTS Series (Fluorinated Liquid) (Custom Designs)

Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.


Temperature range -20°C ~ +80°C series -45°C ~ +80°C series -60°C ~ +80°C series -80°C ~ +80°C series
Flow Control7 ~ 45 L/min7 ~ 45 L/min7 ~ 45 L/min7 ~ 45 L/min
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized





FLT Series (Custom Designs)

The semiconductor temperature control system chiller is mainly used for precise temperature control in the semiconductor production process and testing process. It is specially developed and designed for the semiconductor industry.



Temperature range +5°C ~ +40°C -25°C ~ +40°C -45°C ~ +40°C -80°C ~ +80°C -100°C ~ +80°C
Cooling Capacity6 ~ 40kW2 ~ 15kW1 ~ 8kW0.6 ~ 3kW1.5 ~ 3kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized




semiconductor chiller


FLT Multi Channel Temp Contol (Custom Designs)

Multi channel independent temperature control, which can have a separate temperature range, cooling and heating capacity, thermal conductivity medium flow rate, etc., adopts two independent systems. According to the required temperature range, steam compression refrigeration or ETCU non compressor heat exchange system can be selected. The system can be used for universal expansion tanks, condensers, cooling water systems, etc., which can effectively reduce equipment size and operation steps.


Temperature range -20°C ~ +90°C-45°C ~ +80°C-10°C ~ +80°C-20°C ~ +100°C
Cooling Capacity4kW5 ~ 13kW3 ~ 6kW8 ~ 15kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



chiller for semiconductor


FLTZ Series Frequency Conversion (Custom Designs)

Double frequency conversion series temperature control system, circulation pump and compressor are all adjusted by frequency conversion.



Temperature range -30°C ~ +40°C
Cooling Capacity5 ~ 11kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



semiconductor chiller

ETCU Series (Custom Designs)

Heat exchange type

System without compressor




Temperature range +5°C ~ +90°C
Cooling Capacity5 ~ 30kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



coolant distribution unit


ZLFQ Series (Custom Designs)

Coolant Distribution Unit

Liquid cooling equipment is suitable for semiconductor testing, electronic equipment constant temperature testing, cooling server supporting infrastructure, and other fluid temperature control places.




Temperature range +5°C ~ +35°C +5°C ~ +35°C
Cooling Capacity15 ~ 150kW200 ~ 500kW
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



thermal plates



MD Thermal Chucks Series (Custom Designs)

It is used for testing RF devices and high-density power devices (IGBTs and MOSFETs), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc.




Temperature range -75°C ~ +225°C
Temperature accuracy±0.1℃
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



Gas Temperature Control Systems                                                               



AES Series Jet Impact Testing Machine

(Custom Designs)

Temp Control Range: -120°C ~ +225°C




AI Series Recirculating Air Temperature Control System

(Custom Designs)

Temp Control Range: -105°C ~ +125°C






LQ Series Gas Refrigeration System

(Custom Designs)

Temp Control Range: -110°C ~ -40°C






YQH Series VOCs Waste Gas Condensation Recovery Devicegas chiller

(Custom Designs)

Applied to gas condensation liquefaction recovery. The exhaust gas or other electronic gases are connected to the equipment through the induced draft fan (vacuum pump), liquefied, collected and separated into the collection tank by lowering the temperature, and other gases are discharged, so as to realize the condensation, capture and recovery of the gas.



water chillers

ZLJ / SLJ Series (Custom Designs)

It is suitable for places where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large. It can also be used for gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.



Temperature range -40°C ~ -15°C -80°C ~ -50°C -150°C ~ -110°C
Cooling Capacity0.5 ~ 4kW0.37 ~ 3.1kW2.5 ~ 9kW
ZLJ SeriesSLJ Series
Note: Any temperature range from -150℃ ~ +350℃ and any cooling capacity can be customized



Customized Solutions for your Process Needs                                                             




Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements.

No matter how many tons of chiller you need, we can create the best solution.


We can create a custom solution for temperatures from -150℃ to +350℃.

Custom temperature ranges for specific industries.


We offer a very wide range of cooling capacities for various industries.


We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers.

Regardless of the type of refrigeration compressor, we can design it according to your requirements.


We use a variety of internationally renowned accessories, all of which can be customized for your needs, such as compressors, evaporators, heat exchangers, circulation pumps, controllers, expansion valves and shell materials, etc.


Customize chiller voltage and phase according to your needs.

Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.


Our Advantages

We specializes in custom temperature control systems. We have our liquid chiller system designs in everything from Semiconductor process equipment, FCEV Hydrogen Refeuling Stations and Bio-Pharmaceutical OEM process control systems. LNEYA can design any shape to fit around your equipment, pump selections to meet all your needs, air-cooled, water-cooled, multiple cooling loops. Special interface requirements, digital or analog, pump output heat transfer fluid flow and pressure control, temperature cycling and ramping all available.

Please contact us if you require a temperature control system specifically tailored to your needs. We will be happy to advise you individually and find the right solution for you. It is also possible to show you reference projects that have similar requirements and have already been realized.


Contact Us For Custom Solutions

Contact Us for further assistance with all standard and custom chiller needs



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