The semiconductor temperature control device Chiller is mainly used in the precise temperature control of the semiconductor production process and testing process. The products include fluid fluorinated liquid temperature control (minimum -100 ℃), gas cold and hot rapid temperature change, rapid temperature change cold plate, low temperature gas Refrigeration system (-120°C), direct cooling type refrigeration equipment (-150°C), etc. The company applies a variety of algorithms (PID, feed-forward PID, model-free self-building tree algorithm) in the system to achieve rapid system response and high control accuracy.
Important information such as exhaust and suction air temperature (pressure), condensing temperature, cooling water temperature (pressure), inlet and outlet liquid (gas) temperature (pressure), power consumption, current of each component, voltage, water tank liquid level and other important information of the chiller are all connected through sensors The control system conducts comprehensive management and monitoring records.
- The heating method within 40 ℃ is heated by compressor hot air.
- The circulation system adopts a fully closed design, and the circulation pump adopts a magnetic drive pump.
- 100% helium detection, 100% safety inspection to ensure the safety
and reliability of the system.
- 100% continuous operation of copy machine after 24 hours.
- Condenser Micro-channel heat exchanger (air-cooled), plate heat exchanger (water-cooled)
- Evaporator: plate heat exchanger
- Throttling device: electronic expansion valve
- Control system: PLC programmable controller
- Communication: RS485 interface Modbus RTU protocol, Ethernet interface TCP/IP protocol
- Operation interface: Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
- Circulation system: The whole system is a fully closed system, low temperature does not absorb moisture in the air, does not volatilize heat transfer medium, low temperature automatically replenishes heat transfer medium into the circulation system.
- Shell material: cold-rolled plate spray RAL7035
- The inside of the pipeline contains: stainless steel SUS304, copper, ceramics, silicon carbide, silicone sealant, PTFE.
Customized Solutions For Your Process Needs
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||10～25L/min 5bar max
||15～45L/min 6bar max
||25～75L/min 6bar max
|Cooling capacity @10℃
|Internal circulation fluid volume
|Expansion tank volume
||Silicone oil, fluorinated liquid, ethylene glycol aqueous solution, DI, etc. (DI temperature needs to be controlled above 10°C)
|In and out interface
|Cooling water port
|Cooling water flow@20℃
||Extend -25℃～80℃ by adding electric heater
Whether it is portable, compact, large and small chillers, we can custom design them according to your requirements.
No matter how many tons of chiller you need, we can create the best solution.
- CUSTOM TEMPERATURE RANGES
We can create a custom solution for temperatures from -150℃ to +350℃.
Custom temperature ranges for specific industries.
We offer a very wide range of cooling capacities for various industries.
We provide chillers of various refrigeration types, including but not limited to air-cooled, water-cooled and evaporative-condensing chillers.
Regardless of the type of refrigeration compressor, we can design it according to your requirements.
- CUSTOM CHILLER ACCESSORIES
We use a variety of internationally renowned accessories, all of which can be customized for your needs, such as compressors, evaporators, heat exchangers, circulation pumps, controllers, expansion valves and shell materials, etc.
Customize chiller voltage and phase according to your needs.
Optional 110V/60HZ, 220V/60HZ, 380V/50HZ, 220V/50HZ, 400V/50HZ, 460V/60HZ, 440V~480V/60HZ, etc.
- OTHER CUSTOMIZED SOLUTIONS
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Experience you can count on—
We’ve been designing and building custom products for more than 20 years. From medical chillers to energy storage chillers and everything in between, we’ve built products for virtually every industry and every application.
Same day quotes—
Get a quote for your project today! We often provide custom quotes in as little as 30 minutes.
24/7 customer service—
We are always here for you. Whether you have a question or need a quote, there’s always somebody here to communicate with you 24/7.
Durable, reliable equipment—
Our products are built with premium-grade materials, and we offer competitive warranties on all custom products.
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