LTS -80°C ~ +80°C

반도체 제조 공정에서 반응 챔버의 온도, 방열판의 온도, 열전달 매체의 불연성 유체의 온도 제어를 제어하기 위해 널리 사용됩니다.

1. The pressure holding test of the medium circulation system is 7 bar.

2. Use high-quality magnetic pump without mechanical shaft seal.

3. Optimize temperature sampling and response speed, specially designed control algorithm, can respond quickly to stable temperature control.

4. Enhance the design of circulating pump capacity to meet the high-lift requirements of the system.

5. Continuous high temperature cooling technology meets the requirements of stable operation when heat is loaded on the heat sink plate and requires constant temperature control of cooling and heating.

6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

고객 사례

모델	LTS-802	LTS-803	LTS-804	LTS-806	LTS-808
	LTS-802W	LTS-803W	LTS-804W	LTS-806W	LTS-808W
온도 범위	-80℃～80℃
온도 제어 정확도	±0.1℃ -80℃～-50℃
흐름 제어	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
확장 탱크 용량	10L	10L	15L	15L	20L
시스템 압력 표시	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
컨트롤러	지멘스 PLC, 캐스케이드 제어 알고리즘을 사용한 퍼지 PID 제어 알고리즘.
Temperature control	Heat transfer medium outlet temperature control mode
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Letter of agreement	Ethernet interface TCP/IP protocol
	RS485 interface modbus RTU protocol
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
폐쇄형 순환 시스템	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
압축기	Emerson Copeland/Danfoss Scroll Flexible Compressor
순환 펌프	German brand magnetic circulation pump
증발기	Adopt Danfoss/Gaoli plate heat exchanger
콘덴서	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
냉장 액세서리	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
조작 패널	Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
보안	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.

모델	LTS-802	LTS-803	LTS-804	LTS-806	LTS-808
	LTS-802W	LTS-803W	LTS-804W	LTS-806W	LTS-808W
온도 범위	-80℃～80℃
온도 제어 정확도	±0.1℃ -80℃～-50℃
흐름 제어	7～25L/min		12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	4L	5L	6L	8L	10L
확장 탱크 용량	10L	10L	15L	15L	20L
시스템 압력 표시	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
컨트롤러	지멘스 PLC, 캐스케이드 제어 알고리즘을 사용한 퍼지 PID 제어 알고리즘.
Temperature control	Heat transfer medium outlet temperature control mode
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Letter of agreement	Ethernet interface TCP/IP protocol
	RS485 interface modbus RTU protocol
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
폐쇄형 순환 시스템	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
압축기	Emerson Copeland/Danfoss Scroll Flexible Compressor
순환 펌프	German brand magnetic circulation pump
증발기	Adopt Danfoss/Gaoli plate heat exchanger
콘덴서	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
냉장 액세서리	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
조작 패널	Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
보안	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.

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왓츠앱 위챗

라벨반도체 냉각기 다음: LTS -60°C ~ +80°C