
Thermal Chucks
MD thermal chucks support wafer testing from -75℃ to +225℃, and we offer a variety of standard models and OEM to meet your application and budget needs.
Thermal Chucks Overview
LNEYA proudly launches the MD thermal chuck, providing you with precise and uniform temperature control experience. It comes with a chiller, which can avoid the consumption of liquid nitrogen and carbon dioxide, reducing your carbon footprint by reducing direct and indirect emissions. In addition, each thermal chuck system includes a chuck and a temperature control unit, and its cooling and heating system is ideal for high and low temperature wafer testing. The chuck surface adopts a tight electroplated nickel coating (optional gold coating) to provide better wear resistance and thermal conductivity. LNEYA has been focusing on temperature control for 30 years, and our thermal chuck is your ideal choice for replacement and new projects.

Thermal Chucks Characteristics
- Temperature range: -75℃ ~ +225℃
- Temperature control accuracy: ±0.5℃
- Rapid heating and cooling
- Constant temperature control
- High heat exchange efficiency
- Brand compressor
- Compact structure
- Color touch screen
- Custom design

Customized Solutions
We have more than 30 years of design and manufacturing experience in the field of temperature control, supporting a full range of customized designs, from small mini machines to industrial large equipment.
Email: lilia@lneya.com
Phone / WhatsApp / WeChat: +86-18906195231
Thermal Chucks Specification
| Model | MD-708 | MD-712 | MDL-708 |
| Temp range | -75℃~225℃ | -75℃~225℃ | -75℃~225℃ |
| Temp accuracy | ±0.1℃ | ±0.1℃ | ±0.1℃ |
| Plate Temperature Uniformity | ±1℃ | ±1℃ | ±1℃ |
| flatness | ±50um | ±50um | ±50um |
| Size | diameter200mm | diameter300mm | 150mm*200mm |
| host and card cable | 2.5m or custom | ||
| surface treatment | Electroplated nickel (optional gold plating) | ||
| heat up | -60°C to +25°C: 2 min | ||
| 0°C to +25°C: 2 min | |||
| +25°C to +220°C: 6 min | |||
| cool down | 220°C to +25°C: 2 min | ||
| +25°C to -60°C: 6 min | |||
| Control System | PLC controller, heating feed-forward PID fuzzy algorithm, cooling electronic expansion valve PID adjustment control cooling capacity | ||
| display and record | 7-inch color touch screen, record temperature curve | ||
| communication | Ethernet interface TCP/IP protocol | ||
| Refrigeration Compressors | Tecumseh | ||
| power supply | 220V 50/60HZ 2.8KW | 220V 50/60HZ 4.5KW | 220V 50/60HZ 2.8KW |
| Host size mm | 550×650×370 | 550×650×370 | 550×650×370 |
Other Recommended Chillers
Didn’t find the suitable product?
Our professional technical engineer is waiting for your message to create the perfect product for you.
Email: lilia@lneya.com
Phone / WhatsApp / WeChat: +86-18906195231



Thermal Chucks Advantages
- Efficient: This thermal chuck abandons the indirect cooling method of liquid cooling. It uses direct expansion evaporation of refrigerant to cool, which greatly improves the heat exchange efficiency of the chuck. It only takes 2 minutes to cool from 220℃ to 25℃, and 6 minutes from 25℃ to -60℃. Its heat exchange efficiency is about 5 times that of a liquid chiller.
- Simple: The thermal chuck is equipped with a large-size color touch screen, and the navigation bar and options are very clear. You can complete all operations on the screen. In addition, all buttons and interfaces are clearly labeled to help you distinguish what they are. This direct expansion system is very light and compact, and you can easily move it anywhere for use.
- Customization: LNEYA provides customization services. We can work with you to design the temperature range, temperature control accuracy, cooling capacity, heating and cooling rate, plate size, connection line length, plate coating material and other configuration parameters of the direct expansion thermal chuck according to your application.
- If you don’t know the required parameters, our professional engineers will provide you with free help.

Thermal Chucks Importance
Eco-friendly: MD thermal chuck system comes with its own cooling system, which can be cooled by direct expansion and evaporation of eco-friendly refrigerants. Compared with cooling systems using gases such as liquid nitrogen and carbon dioxide, it does not emit greenhouse gases into the air during the refrigeration process, which can effectively reduce your carbon footprint.
Economic: The purchase, transportation and storage of gases such as liquid nitrogen and carbon dioxide require additional costs. Since these gases are not used, direct expansion thermal chucks can save you money. In addition, it does not require cooling water and supporting equipment such as pipes and water pumps, helping you reduce purchase and maintenance costs.
Accurate: Liquid nitrogen and carbon dioxide refrigeration will inevitably have temperature fluctuations during the cooling process. The thermal chuck uses temperature control technologies such as PLC and feed-forward PID, which can adjust the cooling capacity in time according to load demand and achieve highly accurate temperature control.

Thermal Chucks Applications
The thermal chuck system includes a chuck and a temperature control unit, which has the characteristics of a wide temperature range, rapid temperature change and high-precision temperature control. It has been widely used in wafer testing, material research, electronic component testing, lithium battery cooling and other scenarios.
Wafer testing: Wafers are the basic materials for manufacturing semiconductor devices. Their performance has a great impact on chips, so they need to be tested at different temperatures. The thermal chuck can simulate a variety of constant temperature environments, making it convenient for researchers to understand the performance of wafers at various operating temperatures.
Material research: Many materials need to be used at extremely high or low temperatures, so it is necessary to simulate extreme temperature environments to understand their thermal properties.
Lithium battery cooling: The thermal chuck system is often used to test the charge and discharge rate and capacity changes of lithium batteries at high and low temperatures, helping technicians understand their stability and service life.
Why Choose Us?
LNEYA is a high-tech enterprise focusing on the research and development and production of refrigeration and heating temperature control systems, ultra-low temperature freezers and industrial temperature control equipment. With ultra-low temperature technology and high-precision temperature control, LNEYA occupies an important position in the fields of medicine, semiconductors, new energy, etc. In the future, it will continue to expand intelligent and green refrigeration solutions.
LNEYA water chiller machine is temperature guardians in industrial production and enabling platforms for technological innovation. In chemical reactions, semiconductor manufacturing and other processes, a temperature difference of ±0.1°C may cause the product yield to drop by more than 10%. LNEYA water chiller machine ensures the stable operation of trillion-level industries through precise temperature control. New energy battery testing requires rapid temperature changes from -40°C to 100°C. Bio-pharmaceuticals rely on ultra-low temperature storage at -150°C. These breakthrough technologies are all based on advanced refrigeration technology.


Your Premium Thermal Chucks Manufacturer
We have agents in many countries around the world,
such as: United States, Russia, Australia, France, Netherlands, Sweden, Israel,
Czech Republic, Malaysia, Singapore, Indonesia, Thailand, South Korea, India, etc.
PRODUCTION PROCESS


Contact Us Now
We are happy to provide you with a free temperature control solution
Email: lilia@lneya.com
Phone / WhatsApp / WeChat: +86-18906195231
FAQ

A thermal chuck is usually a round shape with a nickel or gold plated surface. It is mainly used in probe systems to test semiconductor wafers by heating or cooling.
We have paid attention to the noise problem during the design and have taken corresponding measures to reduce the noise. All thermal chucks are very quiet to ensure a quiet working environment.
Of course. We are a cooling system manufacturer and provide customization.
LNEYA Thermo Refrigeration Co.,Ltd.










